品级Class | 面电阻Sheet Resis-tance(Ω/□) | 均匀性Uniformity | 透过率Transmittance | 膜层厚度Thickness |
HTTP500 | 450-550 | (Rmax-Rmin)/2Avg≤12% | ≥98% | 120A±30A |
HTTP500 | 450-550 | (Rmax-Rmin)/2Avg≤12% | ≥94% | 120A±30A |
TP500 | 450-550 | (Rmax-Rmin)/2Avg≤12% | ≥90% | 120A±30A |
TP150 | ≤150 | (Rmax-Rmin)/2Avg≤16% | ≥87% | 2000A±30A |