LED衬底片
对蓝宝石晶体毛坯按特定要求加工制作的基片,可以用金属氧化物化学气相沉积(MOCVD)等技术在基片上外延生长一层单晶薄膜,进一步制作各种元器件。
2英寸LED衬底片
京晶光电主力产品之一,通过生产工艺的不断调整,工艺技术日趋完美;通过权威机构检测认证及客户使用信息反馈,产品质量已可以和国际同类知名厂商产品媲美,目前已有多家国内外众多芯片、外延片生厂商所使用2英寸LED衬底片订单。
4英寸LED衬底片
京晶光电主力产品之一,通过生产工艺的不断调整,工艺技术日趋完美;通过权威机构检测认证及客户使用信息反馈,产品质量已可以和国际同类知名厂商产品媲美,目前已有多家国内外众多芯片、外延片生厂商所使用4英寸LED衬底片订单。
6英寸LED衬底片
京晶光电最新研发的产品之一,是高质量大尺寸蓝宝石晶体LED衬底片的标志性产品。通过生产工艺的不断调整,工艺技术日趋完美;产品质量已成功得到下游用户的有效认证。
Item | 2" | 4" | 6" |
Crystal | LED Grade Sapphire | LED Grade Sapphire | LED Grade Sapphire |
Sapphire purity | ≥99.998% | ≥99.998% | ≥99.998% |
Color | Transparent | Transparent | Transparent |
Orientation | C plane tiled M axis 0.20°±0.1° | C plane tiled M axis 0.20°±0.1° | C plane tiled M axis 0.20°±0.1° |
Diameter | 50.8±0.1mm | 100±0.2mm | 150±0.2mm |
Thickness | 430±15µm | 650±25µm | 1300±25µm |
Primary Flat Location | A-axis ± 0.2° | A-axis ± 0.2° | A-axis ± 0.2° |
Flat Length | 16.0±1.0 mm | 30.0±1.0 mm | 49.0±1.0 mm |
Front Side Surface | Mirror polished , EPI-Ready | Mirror polished , EPI-Ready | Mirror polished , EPI-Ready |
Surface Roughness | Ra < 3Å | Ra < 3Å | Ra < 3Å |
Back Side Roughness | Fine ground, Ra=1.0±0.2um | Fine ground, Ra=1.0±0.2um | Fine ground, Ra=1.0±0.2um |
TTV | ≤ 5.0µm | ≤ 10µm | ≤ 15µm |
BOW | ≤ -10µm | ≤ -20µm | ≤ -30µm |
Warp | ≤ 10.0µm | ≤ 20µm | ≤ 40µm |
Bubble & Color | None by visual inspection in intensive light | None by visual inspection in intensive light | None by visual inspection in intensive light |
Ground Boundary | None by visual inspection in fluorescent light | None by visual inspection in fluorescent light | None by visual inspection in fluorescent light |
Cleanliness | Free visible contamination | Free visible contamination | Free visible contamination |
Packaging | Vacuum packed in one-piece box or Entegris cassettes of 25 in a class 100 clean room, under a nitrogen atmosphere | Vacuum packed in one-piece box or Entegris cassettes of 25 in a class 100 clean room, under a nitrogen atmosphere | Vacuum packed in one-piece box or Entegris cassettes of 25 in a class 100 clean room, under a nitrogen atmosphere |